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  • PLAZMARK® for O₂ Cleaning

Overview

Optimal for detecting radical based plasmas

Optimal for detecting radical based plasmas such as O₂, N₂, Air, CF₄, H₂ and NH₃.(In some cases color change will also occur for Ar plasma)
It can also be used for UV cleaning and UV ozone cleaning, as it is responsive to O radicals.

  • Surface treatment prior to metal plating
  • Surface treatment prior to metal plating
  • Surface treatment prior to wire bonding or flip chip bonding
  • Cleaning prior to under-filling, after the component mounting process
Cleaning prior to the sealing of electronic components such as LSIs, memory, MEMS, or LED

Product Video

Line-up

3 different sensitivity types and 3 different shape types are available

  • “Just Place It” Card Type
    “Just Place It” Card Type
  • “Adhesive” Label Type
    “Adhesive” Label Type
  • “Large-area Distribution Evaluation” Sheet Type
    “Large-area Distribution Evaluation” Sheet Type

Color Change

  • Low-frequency power supply plasma treatment equipment [O₂]
    Low-frequency power supply plasma treatment equipment [O₂]
  • Parallel-plate type reactor for RF plasma treatment
    Parallel-plate type reactor for RF plasma treatment

Application for in-plane uniformity evaluation

  • Uniformity can be evaluated based on color change
    Uniformity can be evaluated based on color change
  • Example of color difference mapping (1,000 sccm, 1.0 kW)
    Example of color difference mapping (1,000 sccm, 1.0 kW)

Specifications

PLAZMARK® for O₂ Cleaning

Processing Gases (Plasma Species): Gases such as O₂ that are suitable for radical-controlled plasmas (O₂, N₂, Air, CF₄, H₂, NH₃, (Ar))

No.1 (High Sensitivity)

Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate: PET Film Color Change Part: Organic Colorants, Resin
Size Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 210 × 297 × 0.2 mm
Color Change Part: 190 × 290 mm
Quantity/Pack 100 pcs 100 pcs 5 sheets
Product No. PLC0207-01 PLL0207-01 PLC2130-01

No.2 (Middle Sensitivity)

Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate: PET Film Color Change Part: Organic Colorants, Resin
Size Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 210 × 297 × 0.2 mm
Color Change Part: 190 × 290 mm
Quantity/Pack 100 pcs 100 pcs 5 sheets
Product No. PLC0207-02 PLL0207-02 PLC2130-02

No.3 (Low Sensitivity)

Shape Card Label Sheet
Heat Resistance 100℃
Structure Substrate: PET Film Color Change Part: Organic Colorants, Resin
Size Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 20 × 70 × 0.2 mm
Color Change Part: φ11 mm
Substrate: 210 × 297 × 0.2 mm
Color Change Part: 190 × 290 mm
Quantity/Pack 100 pcs 100 pcs 5 sheets
Product No. PLC0207-03 PLL0207-03 PLC2130-03

* Note regarding sensitivity categories: Series with smaller number values feature higher sensitivity products, meaning color change occurs under plasma processes of lower output power and shorter duration. Larger or smaller numbers within a given series have no correlation to sensitivity level.

The specifications and appearance of our products are subject to change without notice due to our efforts toward continuous improvement. Differences may be found between the color of the products portrayed in our promotional materials and the color of actual products, related to variances in photographing technique or the printing ink being used.
PLAZMARK🄬, Plasma Indicator🄬, and “Visualize the Plasma Process🄬” are registered trademarks of Sakura Color Corporation.
PLAZMARK🄬 is a registered trademark in Japan, the E.U., the U.S., and other countries.