Because it takes a shape similar to that of the substrate in use, this indicator can be set in the equipment and in-plate distribution evaluation can be carried out easily, with no special handling necessary. A heightened level of cleanliness is achieved due to the product’s minimization of outgassing rates.
Plasma CVD (carrier gases only)
Sputtering (reverse sputtering only)
Application for in-plane uniformity evaluation
Color differences can be quantified by utilizing a proprietary “Plasma Indicator Evaluation System.”
Even slight differences essentially unrecognizable to the naked eye can be detected. Accordingly, in-plane uniformity can be assessed intuitively by means of mapping.
Results can be obtained easily and without time-consuming steps.